Is EBL Charge Dissipation Rate the Missing Link in Reliable Nanofabrication?
If you’re in the business of nanofabrication, you know the frustration of investing hours into electron beam lithography (EBL) only to be thwarted by distorted patterns and inconsistent results. You’ve got the best equipment, the sharpest minds, and yet, those sub-10nm features sometimes look more like a child’s sketch than the precise circuits you envisioned. Why? The culprit is often charge buildup-a sneaky, invisible enemy that can derail even the most carefully planned EBL process.
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